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Cathodoluminescence system for SEM

The new Gatan Monarc pushes the boundaries of what’s possible with a SEM-based cathodoluminescence system. It’s a next generation instrument with a boost in sensitivity and spectral resolution.

What is cathodoluminescence?

  • Unmatched spatial (<10 nm), angular (1°) and wavelength (0.1 nm) resolution
  • Capture angle- and wavelength-resolved CL data simultaneously
  • Collect hyper-spectral data up to 30 times faster than other CL detectors

Easy to Use

  • Automated alignment and recipes for the best results
  • Permanently aligned optics for reproducibility
  • Large field of view to increase productivity

Accurate Correlation

  • Detect multiple signals simultaneously
  • Correlated imaging of physical properties and composition with CL data
  • Full use in-lens SEM detectors during CL measurements

Contact us for more information and quotes:
+44 (0)1223 422 269 or info@blue-scientific.com

Gatan Monarc

Composite wavelength-filtered image a GaN/InGaN multi-quantum well sample with V-pit defects. Extracted from a hyperspectral data cube acquired with the Monarc.


  • Nanophotonics
  • Optoelectronics
  • MicroLEDs and micropillars – more info…
  • Geosciences – more info…
  • LED & laser failure analysis
  • Light-matter interactions
  • Photovoltaic material characterisation
  • Phosphor technology


  • High sensitivity and resolution
  • Most complete CL analysis to date
  • Unique wavelength- and angle-resolved capabilities
  • 400x larger field of view than other CL detectors

Unique Capabilities

Angle-Resolved (ARCL)

  • Study how light and matter interact far below the optical diffraction limit.
  • 400x larger field of view than other CL detectors with very similar resolution (patent pending)

Wavelength- and Angle-Resolved (WARCL)

  • Examine how light and matter interact at multiple viewing angles and wavelengths – more info…
  • Achieve previously impossible visualisations and studies, due to Monarc’s unique optical design

Polarisation Filtering

Determine the emission polarisation properties of deep sub-wavelength structures, such as:

  • Ooptical nanoantenna
  • Nano-cavities
  • Photonic crystals

More about the new modes

Thin film InGaN-based LED

Near-complete characterisation of emission from a thin-film InGaN-based LED. Acquired with Monarc’s unique wavelength- and angle-resolved spectroscopy mode. Interference between emitted and reflected light rays creates an emission pattern that varies according to the wavelength.

Two models are available, each suited to a different application area:


For geoscience and mapping applications

The Monarc surpasses previous SEM CL detectors with the largest field of view, independent of spectral resolution. Hyperspectral data is collected with greater spatial sampling, using new wavelength-filtered spectrum imaging technology.

Monarc Pro

For nanophotonic and optoelectronic material applications

This model delivers the greatest sensitivity and spectral resolution of any CL system available. You’ll also benefit from unique wavelength- and angle-resolved analysis and polarisation-filtering options.

Polarisation-filtered CL map

Polarisation-filtered CL map with better than 10 nm spatial resolution. Coloured overlay of two orthogonal linear polarisations from a collection of 100 nm gold nanostars.

CL Tutorial

See how SEM-based CL works in this 1 hour tutorial from Gatan, from M&M 2020:


More Video Examples