Renishaw InLux^TM

Renishaw’s InLux™ SEM Raman Interface enhances your SEM chamber with integrated Raman, photoluminescence (PL), and cathodoluminescence (CL) analysis. This system enables you to collect precise Raman spectra that produces 2D and 3D images whilst simultaneously imaging in SEM, without requiring any modifications to your SEM chamber.

By keeping the sample static during both SEM imaging and Raman data collection, the InLux™ ensures accurate image co-location. Its encoded position control, down to 50 nm, provides highly detailed Raman imaging, allowing for large-area analysis of samples larger than 0.5 mm in all axes.

Information-Rich:
For co-located data, Raman, photoluminescence (PL), and cathodoluminescence (CL) analyses are simultaneously performed alongside SEM imaging.

Broad Compatibility:
The InLux™ interface fits various SEMs across manufacturers without requiring modifications.

Non-Invasive:
The probe fully retracts with one click, ensuring no disruption to other SEM workflows.

Heterogeneity Detection:
Generate confocal Raman images to quickly assess sample distribution and composition.

Enhanced Viewing:
Large-area optical imaging and montaging allow clear visualisation of sample areas of interest.

Flexible Setup:
Supports up to two laser wavelengths and an optional CL module.

Efficient Operation:
Quickly switch between laser wavelengths with a single click for complex sample analysis.