Bruker Dimension Edge PSS
3D Metrology and Process Control for PSS (Patterned Sapphire Substrate)
The Bruker Dimension Edge PSS Atomic Force Microscope (AFM) with AutoMET metrology software is a nano-metrology and nano-inspection system designed specifically for LED substrate and epitaxial manufacturers.
Built on Bruker’s established Dimension Edge AFM platform, the Edge PSS delivers incredible resolution, tailored for use in production lines. Bruker’s proprietary AutoMET control and analysis software is designed to meet the needs of patterned sapphire substrate manufacturers, with automated, easy-to-use features at a budget price.
Analyse substrate features with AFM resolution, with automatic statistical data for the entire wafer. Key data is generated simultaneously:
- Side wall angle
- Feature profile
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The Dimension Edge PSS runs AutoMET software that is designed to meet LED manufacturing requirements. Laser alignment is easy, and reports are generated automatically. There are two distinct modes of operation:
- Operator Level – A simple user interface that guides users through the steps of tip changing, alignment, tuning and qualification. Single button operation runs up to 9 wafers automatically with simple PASS/FAIL results.
- Engineer Level – A password-protected section allows engineers to access all critical AFM parameters. Process engineers can adjust all necessary pass/fail criteria easily.