Bruker Dektak XTL
Gage-Capable QA/QC Stylus Profiler
The Bruker Dektak XTL stylus profiler delivers accurate, repeatable and reproducible metrology for a wide range of applications. Test samples up to 350mm x 350mm, including 200mm and 300mm wafers.
Ideal for the Production Floor
The Dektak XTL has a small footprint and integrated isolation with interlocking doors, ideal for production floor environments. It is highly automated, with dual-camera architecture for enhanced spatial awareness. Bruker’s production software, with optional pattern recognition, makes data collection intuitive and repeatable, minimising operator-to-operator variability.
The Bruker Dektak XTL is ideal for industrial thin film deposition monitoring in the touch-panel, solar, flat panel display and semiconductor industries, for both research and QA/QC.
Contact us for more information and quotes:
+44 (0)1223 422 269 or info@blue-scientific.com
Critical Results for Large Format Applications
Bruker Dektak XTL production software
Wafers
- Step height for deposited thin films (metals, organics)
- Step height for resists (soft film materials)
- Etching rate determinations
- Chemical mechanical polishing (erosion, dishing, bow)
Large Substrate
- Printed circuit boards (bumps, step heights)
- Window coatings
- Wafer masks
- Wafer chuck coatings
- Polishing pads
Glass Substrate and Displays
- AMOLEDs
- Step height measurements for LCD R&D
- Film thickness measurements for touch panels
- Thin film measurements for solar coatings
Flexible Electronic Films
- Organic photo-detectors
- Organic films printed on films and glass
- Copper traces for touch screens
