How to use dynamic nanoindentation characterise CMP pads. In this example, the Bruker Hysitron TS 77 Select was employed to quantitatively measure the viscoelastic properties of a hard pad.
This is a robust, reliable method for examining CMP pad surface quality and processes.
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We are proud to announce that Blue Scientific has been appointed by Bruker as the exclusive agents for Bruker’s Micro X-ray Fluorescence (XRF) product range throughout the UK and Ireland. Bruker Micro-XRF Micro XRF is a non-destructive technique for elemental analysis of a diverse range of samples, including inhomogeneous and irregularly shaped specimens. The product line […]
