• Pinpoint areas to study
  A patented optical viewing system brings sample features into focus, and three cameras provide an unmatched view of the sample, making it quick and easy to locate areas of interest.
• Focus on features of interest
  Select an area to analyse from 50 µm to 400 µm in 5 µm steps, fitted to your area of interest to maximise the signal.
• Fast data acquisition and superior detection
  With optimised electron optics, hemispherical analyser and detector.
• Self-calibration in minutes
  With a single button press, to ensure confidence in your data.
• Specialist sample holders (optional)
  For angle-resolved XPS, sample bias measurements and inert transfer from a glove box.

Insulator Analysis

A single-click charge compensation system makes insulator analysis as straightforward as any other sample. Thermo’s patented dual-beam flood source is designed to prevent sample charging, with very low energy electrons and ions (less than 1 eV). This means that charge referencing is no longer necessary in most cases.

Depth Profiling

Go beyond the surface with an EX06 ion source. Automated source optimisation and gas handling ensure excellent performance and reproducibility.

Chemical State Imaging

Generate chemical state images of the sample’s surface. These can either focus on small features or the entire sample, as large as the complete stage. Thermo Scientific’s SnapMap feature adds fast XPS imaging for feature alignment and analysis.